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The main idea of this numerical simulation was that the roughness of a surface affects the scattering of light and therefore the optical measurements.

The measurements were simulated with a light incidence angle of 0° (we dont want to make ellipsometry in this case).

Two methods are present, a basic method calculating for all layers and a method called EMA (effective medium approximation).

Reférence :

• Hiroyuki Fujiwara.Spectroscopic Ellipsometry : Principles and Applications. Wiley,Chichester, 2007.

• Michael Quinten.A Practical Guide to Optical Metrology for Thin Films : Quin-ten :optical metrology, 2012.