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Semicon Fab Technologies- Cleanroom system Architecture

Hardware Requirements

This project implements an AI-powered decontamination system for a cleanroom environment in the semiconductor industry. Here's a breakdown of the essential hardware components:

  • Industrial PC (IPC):
    • High reliability
    • Wide operating temperature range
    • Vibration resistance
    • Dustproof casing
    • Consider brands specializing in industrial automation.
  • Particle Sensors (Multiple):
    • PVE201 PARTICULATE MATTER & AIR QUALITY TRANSMITTER (or equivalent)
    • High sensitivity
    • Real-time data output
    • Network connectivity
    • Additional sensors for comprehensive coverage (if required)
  • Decontamination System:
    • Air filtration unit
    • UV germicidal lamp system
    • Control interface compatible with chosen communication protocol
  • Industrial-grade Ethernet Switch:
    • Reliable communication between devices
    • PoE (Power over Ethernet) for specific sensors
    • Hardened construction

Optional Hardware:

  • Air Quality Sensors: Temperature, humidity, VOCs monitoring.
  • Cameras (optional): Visual inspection and AI-powered image analysis.
    • Industrial cameras with sealed housings.
  • Uninterruptible Power Supply (UPS): Power backup for cleanroom integrity.

Software:

  • AI Software: Custom-developed or pre-trained solution for particle detection/classification.
  • Industrial Automation Software: Data acquisition, decontamination control, visualization.

Communication Protocol:

  • Modbus RTU, Profinet, EtherCAT (ensure compatibility).

Data Security:

  • Secure data transmission protocols and access controls.

Scalability:

  • Consider modular or upgradable hardware for future expansion.

ML System Design

This section outlines a possible Machine Learning (ML) system design for the project:

1. Data Acquisition:

  • Real-time particle count data from PVE201 and potentially additional sensors.
  • Preprocessing (cleaning, normalization).

2. Anomaly Detection Model:

  • Anomaly detection algorithms (Isolation Forest, LOF, OCSVM).
  • Learns "normal" particle behavior and flags deviations as potential contamination.
  • Training data: Historical data of particle counts representing "clean" conditions with labeled contamination events (if available).

3. Decontamination Activation Logic:

  • Thresholding on anomaly score for decontamination activation.
  • Spatial reasoning (clustering/geospatial analysis) for pinpointing contamination location (if multiple sensors).

4. Model Training and Deployment:

  • Train-Test Split for model evaluation.
  • Continuous learning mechanisms for model adaptation.
  • Deployment on Industrial PC for real-time processing and decontamination triggering.

Reference Research Papers

Dataset Columns

  • Timestamp
  • Sensor ID
  • Particle Count
  • (Optional) Environmental Data (Temperature, Humidity, VOCs)
  • (Optional) Label (for training: "normal" or "contamination event")

Further Considerations:

  • Design adjustments based on chosen model and cleanroom complexity.
  • Feature engineering for improved model performance.
  • Visualization tools for real-time data and model predictions.

This is a foundational outline. Further research and experimentation are recommended to tailor the solution to your specific needs.

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