Semicon Fab Technologies- Cleanroom system Architecture
This project implements an AI-powered decontamination system for a cleanroom environment in the semiconductor industry. Here's a breakdown of the essential hardware components:
- Industrial PC (IPC):
- High reliability
- Wide operating temperature range
- Vibration resistance
- Dustproof casing
- Consider brands specializing in industrial automation.
- Particle Sensors (Multiple):
- PVE201 PARTICULATE MATTER & AIR QUALITY TRANSMITTER (or equivalent)
- High sensitivity
- Real-time data output
- Network connectivity
- Additional sensors for comprehensive coverage (if required)
- Decontamination System:
- Air filtration unit
- UV germicidal lamp system
- Control interface compatible with chosen communication protocol
- Industrial-grade Ethernet Switch:
- Reliable communication between devices
- PoE (Power over Ethernet) for specific sensors
- Hardened construction
Optional Hardware:
- Air Quality Sensors: Temperature, humidity, VOCs monitoring.
- Cameras (optional): Visual inspection and AI-powered image analysis.
- Industrial cameras with sealed housings.
- Uninterruptible Power Supply (UPS): Power backup for cleanroom integrity.
Software:
- AI Software: Custom-developed or pre-trained solution for particle detection/classification.
- Industrial Automation Software: Data acquisition, decontamination control, visualization.
Communication Protocol:
- Modbus RTU, Profinet, EtherCAT (ensure compatibility).
Data Security:
- Secure data transmission protocols and access controls.
Scalability:
- Consider modular or upgradable hardware for future expansion.
This section outlines a possible Machine Learning (ML) system design for the project:
1. Data Acquisition:
- Real-time particle count data from PVE201 and potentially additional sensors.
- Preprocessing (cleaning, normalization).
2. Anomaly Detection Model:
- Anomaly detection algorithms (Isolation Forest, LOF, OCSVM).
- Learns "normal" particle behavior and flags deviations as potential contamination.
- Training data: Historical data of particle counts representing "clean" conditions with labeled contamination events (if available).
3. Decontamination Activation Logic:
- Thresholding on anomaly score for decontamination activation.
- Spatial reasoning (clustering/geospatial analysis) for pinpointing contamination location (if multiple sensors).
4. Model Training and Deployment:
- Train-Test Split for model evaluation.
- Continuous learning mechanisms for model adaptation.
- Deployment on Industrial PC for real-time processing and decontamination triggering.
- Anomaly Detection for Particle Sensor Data in Cleanrooms Using Isolation Forest: link to paper 1: https://www.mdpi.com/1424-8220/20/19/5650
- A Machine Learning Based Approach for Cleanroom Monitoring and Fault Detection: link to paper 2: https://ieeexplore.ieee.org/document/9332962
- Real-time Anomaly Detection with Local Outlier Factor: link to paper 3: https://ieeexplore.ieee.org/document/9439459
- Timestamp
- Sensor ID
- Particle Count
- (Optional) Environmental Data (Temperature, Humidity, VOCs)
- (Optional) Label (for training: "normal" or "contamination event")
Further Considerations:
- Design adjustments based on chosen model and cleanroom complexity.
- Feature engineering for improved model performance.
- Visualization tools for real-time data and model predictions.
This is a foundational outline. Further research and experimentation are recommended to tailor the solution to your specific needs.